Latest News for: boron trichloride

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Brooks Instrument Introduces First Fully Pressure-Insensitive Pressure-Based Mass Flow Controller for Etch and CVD Processes in Semiconductor Manufacturing

Automation World 14 Oct 2021
Mass flow controllers (MFCs) are the most important component in the gas delivery systems used to produce silicon wafers ... Laminar Flow Element ... This design makes it possible to accurately measure the flow of challenging low vapor pressure process gases used in etch processes, including silicon tetrachloride, boron trichloride and hexafluorobutadiene.
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University of Utah chemistry building evacuated after chemical spill

The Salt Lake Tribune 19 Jun 2019
The chemical was boron trichloride diethelyne, which may become hazardous if it mixes with water, said Tony Allred, captain of the Salt Lake City Fire Department’s hazardous materials response team. The lab tech was taken to a hospital as a precaution, and the building was evacuated after the spill, which occurred about 6 p.m., Allred said ... .
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